There are a wide variety of internal mounting styles to suit different machine layouts. The most common are fixed or sliding internal mounts. These can be from a large flange plate, a standard vacuum port connector or a bearing / seal block. As an option the adjustment of the magnetron position can be via a crank handle on the atmosphere side of the vacuum chamber.

Internally mounted rectangular magnetrons can also be without a support system where the customer provides the support and water / power connections. In this case a series of mounting points are provided on the magnetron. It is generally recommended to maintain the water and power connections at atmosphere as it is more robust from a vacuum point of view. On  occasion, where the water and power connections are required to be in-vacuum, this can also be provided.

Customized mounting designs can also be realised to suit an existing machines layout. If engineering drawings are available, then these can be used to design the same support points. In addition the same water,  power and gas services can be used. If good drawings are not available then a Gencoa design engineer can travel to the customers site and take the necessary dimensions.

A common type of mounting for the vacuum web coating industry is the cantilever type. Here the magnetron is supported from one end of the magnetron only. This allows insertion into the machine from one side and make servicing and target change quicker and easier. A range of cantilevers are available depending upon the size of the magnetron. The cantilever is modelled using a stress analysis package to ensure deflections of the end of the magnetron are less than 1mm to prevent changes in uniformity down the cathode length. The cantilever will usually have connection point for a mounting trolley that allows removal / installation to the customers bulkhead flange. 

In all cases where a support is manufactured by Gencoa for the customers system, a 3D CAD model and 2D engineering drawings are provided to ensure that the products connect seamlessly into the chamber. There are no specific rules in how the magnetrons integrated and Gencoa have designed many variations and different types. Where possible is is recommended that the water and power connections be held at atmosphere to improve vacuum reliability in the long term.