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| 3" target -SW/PP75 |
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General specifications
| Target Size |
71mm OD x 3mm thick |
| Backing Plate |
75mm OD x 3mm thick |
| Magnetic material |
Fe : 1.0mm thick |
| Ni : 3mm thick |
| Erosion diameter |
SW:71mm, PP:60mm |
| Mounting style |
| Internal |
25.4mm OD 300mm long shaft |
| External |
DN160-ISO |
| Operating Pressure |
1~10 x 10-3 mbar |
| Power connection |
N type |
| Cable |
RG393 |
| Max. DC |
1.75kw, DC/pulsed DC |
| Max. RF*1 |
200W with RG393 cable |
| Water tube |
1/4" PFA |
| Water requirements |
1 litre/min per kw, 3 bar max.
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| No deionized water required |
Note1) RF option available for more than 200WRF
All specifications vary depending on the process, target materials...etc.
Please contact Sales for details. |
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Available Options
Magnetic Options
Balanced (SW75) / Unbalanced (PP75) Option
High Strength Option (HS)
Low Strength Option (LS)
LOOP for magnetic materials Option (LP)
RF Option (RF)
Mechanical Options
Tilting Option : +/-30 degrees
Ar Gas Injection
Sputter Chimney
Shutter Option
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| Product Specs |
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