|
| 6" target - SW/PP150 |
|
General specifications
| Target Size |
146mm OD x 6mm thick |
| Backing Plate |
150mm OD x 6mm thick |
| Magnetic material |
Fe : TBC
|
Ni : TBC
|
| Erosion diameter |
SW:146mm, PP:TBC |
| Mounting style |
| Internal |
38mm OD 300mm long shaft |
| External |
DN200-ISO |
| Operating Pressure |
1~10 x 10-3 mbar |
| Power connection |
N type (or 7/16)
|
| Cable |
RG393 |
| Max. DC |
7kw, DC/pulsed DC |
| Max. RF*1 |
200W with RG393 cable |
| Water tube |
3/8" PFA |
| Water requirements |
1 litre/min per kw, 3 bar max.
|
| No deionized water required |
Note1) RF option available for more than 200WRF
All specifications vary depending on the process, target materials...etc.
Please contact Sales for details.
TBC=to be confirmed |
|
|
 |
|
 |
 |
| Bonded target |
Mono block stepped target |
|
|
Magnetic Options
Balanced (SW150) / Unbalanced (PP150) Option
High Strength Option (HS)
Low Strength Option (LS)
LOOP for magnetic materials Option (LP)
RF Option (RF) Full Face Erosion Option (FFE)
Mechanical Options
Tilting Option : +/-30 degrees
Ar/Reactive Gas Injection Option
Shutter Option
Floating Anode Option
Biased Anode Option
Water Cooled Anode Option
Hidden Anode Option
|
|
|
|
| Product Specs |
|
|
 |
|
Print