Products Magnetron Circular 8" target - SW/PP200 Print
8" target - SW/PP200

General specifications

Target Size 192mm OD x 6mm thick
Backing Plate 200mm OD x 6mm thick
Magnetic material Fe : TBC
Ni : TBC
Erosion diameter SW:192mm, PP:TBC
Mounting style
Internal   38mm OD 300mm long shaft
External   DN250-ISO
Operating Pressure 1~10 x 10-3 mbar
Power connection N type (or 7/16)
Cable RG393
Max. DC 12kw, DC/pulsed DC
Max. RF*1 200W with RG393 cable
Water tube 3/8" PFA
Water requirements 1 litre/min per kw, 3 bar max.
No deionized water required
Note1) RF option available for more than 200WRF
All specifications vary depending on the process, target materials...etc.
Please contact
Sales for details.
TBC = to be confirmed

SWPP200 magnetron Outline
SWPP200 Target Outline

Magnetic Options
Balanced (SW200) / Unbalanced (PP200) Option
High Strength Option (HS)
Low Strength Option (LS)
LOOP for magnetic materials Option (LP)
RF Option (RF)
Full Face Erosion Option (FFE)



Mechanical Options
Tilting Option : +/-30 degrees
Ar/Reactive Gas Injection
Floating Anode Option
Biased Anode Option
Water Cooled Anode Option
Hidden Anode Option


 



Product Specs
SW/PP50 - 2"
SW/PP75 - 3"
SW/PP100 - 4"
SW/PP150 - 6"
SW/PP200 - 8"
SW/PP250 - 10"
SW/PP300 - 12"
SW/PP400 - 16"