Products Magnetron Circular 10" target - SW/PP250 Print
10" target - SW/PP250

General specifications

Target Size 246mm OD x 10mm thick
Backing Plate 250mm OD x 8mm thick
Magnetic material Fe : TBC
Ni : TBC
Erosion diameter SW:246mm, PP:TBC
Mounting style
Internal   38mm OD 300mm long shaft
External   DN300-ISO
Operating Pressure 1~10 x 10-3 mbar
Power connection N type (or 7/16")
Cable RG393
Max. DC 19.5kw, DC/pulsed DC
Max. RF*1 200W with RG393 cable
Water tube 3/8" PFA
Water requirements 1 litre/min per kw, 3 bar max.
No deionized water required
Note1) RF option available for more than 200WRF
All specifications vary depending on the process, target materials...etc.
Please contact
Sales for details.
TBC=to be confirmed
SW250 internal Magnetron with target erosion
SW250 magnetron Plasma

 swpp250 magnetron outline
swpp250 magnetron target outline

Magnetic Options
Balanced (SW250) / Unbalanced (PP250) Option
High Strength Option (HS)
Low Strength Option (LS)
LOOP for magnetic materials Option (LP)
RF Option (RF)
Full Face Erosion Option (FFE)



Mechanical Options
Tilting Option : +/-30 degrees
Ar/Reactive Gas Injection
Floating Anode Option
Biased Anode Option
Hidden Anode Option
Water Cooled Anode Option
Shutter Option




 



Product Specs
SW/PP50 - 2"
SW/PP75 - 3"
SW/PP100 - 4"
SW/PP150 - 6"
SW/PP200 - 8"
SW/PP250 - 10"
SW/PP300 - 12"
SW/PP400 - 16"