Products Magnetron Circular 12" target - SW/PP300 Print
12" target - SW/PP300

General specifications

Target Size 300mm OD x 12mm thick
Backing Plate 306mm OD x 8mm thick
Magnetic material Fe : n/a
Ni : 3mm, Co : 3mm
Erosion diameter SW:300mm, PP: TBA
Mounting style
Internal   63.5mm OD 300mm long shaft
External   DN420-ISO
Operating Pressure 1~10 x 10-3 mbar
Power connection N type
Cable RG393
Max. DC 28kw, DC/pulsed DC
Max. RF*1 200W with RG393 cable
Water tube 3/8" PFA
Water requirements 1 litre/min per kw, 3 bar max.
No deionized water required
Note1) RF option available for more than 200WRF
All specifications vary depending on the process, target materials...etc.
Please contact
Sales for details.
SW300 3 ring plasma magnetron
sw300 magnetron outline drawing

Magnetic Options
Balanced Option (SW300)
Unbalanced Option (PP300)
High Strength Option (HS)
Low Strength Option (LS)
RF Option (RF)
Full Face Erosion Option (FFE)


Mechanical Options
Tilting Option : +/-30 degrees
Ar/Reactive Gas Injection Option
Floating Anode Option
Biased Anode Option
Water Cooled Anode Option
Hidden Anode Option




 



Product Specs
SW/PP50 - 2"
SW/PP75 - 3"
SW/PP100 - 4"
SW/PP150 - 6"
SW/PP200 - 8"
SW/PP250 - 10"
SW/PP300 - 12"
SW/PP400 - 16"