The most common type of magnetron can be found inside a microwave oven. This is a magnetron tube.
- Post magnetrons, 1936, Penning
- Closed loop magnetron sources, 1960’s, Knauer
- First “Sputter gun”, 1971, Clarke
- Cylindrical magnetron, 1973, Sloan Tech Co. (Corbani) US 3-878-085
- Inventor of planar magnetron sputtering source,1979, Chapin
- First commercial wide web sputter coating machine, 1980, Leybold
- Cylindrical post magnetron with rotating array, 1981, Ford Motor Co.
- Unbalanced magnetron, 1986, Windows and Savvides
- Dual planar magnetron configuration commercialised, 1992, Scherer, Scmitt, Latz and Schanz
- High Ionisation magnetron, 1995
- DVD source, 2000, Balzers, US 6,068,742
- High yield erosion, static and moving magnets, various, Hitachi, VacTec, Sierra, Applied Materials, Balzers, Gencoa
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