Gencoa launched the new range of high vacuum circular magnetron sputter sources in Spring 2005. This design maintains it's flexibility but improves affordability. The new standard circular magnetron is available from 2" to 14" on both internal shaft mount and external flange mounting with most of the parts from stock, hence improving the delivery period. The new standard circular sources retain all the advantages of Gencoa magnetic options tailored to your individual application.

 

The High Yield magnetics are the most commonly produced magnetic type and are recommended for most applications where increased machine up-time or reduced material costs are required. Please refer to Target Erosion for more detail. 45% Percent Guarantee Gencoa are so confident of the performance of the HY magnetics that we will refund the HY cost if at least 45% of the target is not achieved (by weight). This based upon a 100, 125  & 150mm wide bonded target type under normal operating conditions. The actual target use should be 50-60% - anything less than 45% and you will 'get your money back'.

• Internal shaft mount and wall mount feedthrough
• External ISO standard/CF flange mount
• +/- 30° tilting option
• Ar gas injection
• Custom fixing/mounting
• Electrically floating and hidden anode
• Water cooled anode
• Sputter chimney
• Shutter option (tilting/sliding also available)
• Psuedo-UHV option (high temp. spec. O-ring seal)
• High Power RF option

• Speedflo:  Advanced fully digital controller for reactive sputtering control
  
• Plasma emssion monitor
• Impedance control
• 4 channels capability
• Optical fibre can be built in to sources