Magnetron sputtering cathodes for magnetron sputtered thin films

	Magnetron
	Circular
	Rectangular
	Double
	Magnetic Types
	Mechanical options
	Anode options
	Target mounting
	Water & Power
	Gas connections
	High Power RF
	Process Controller
	Ion Source
	Retrofit
	EFS
	Zycoa
	Carbon Low...
	Gentest

The standard Gencoa anodes is a multipiece design with a thick side wall (10-12mm) and a thinner detachable front anode. The front anode has a rough finish prepared by alumina shot blasting to prevent de-adhesion of coating build-up during operation. There are a number of further options available on request depending upon the process requirements.

Low Profile Anodes

The preferred option for the front anode is to reduce the height above the target in order to prevent coating build-up and subsequent flaking that may cause shorts or defects.

argon gas injection on sputter magnetron

Gas Bar Anodes

Gencoa have developed a unique means to incorporate the argon or reactive gas distribution system into the side anode walls. This provides a high uniformity gas shower next to the target surface to provide enhanced coating uniformity and gas control. The gas is connected via a single atmosphere side VCO connection and can be used with a dedicated MFC or to a common cathode argon gas feeding system.

Water Cooled Anodes

The anode is the main electrical return for the plasma electrons. As such they will heat up. As standard the rear mounting plate of the magnetron is water cooled. This provides indirect water cooling to the anode structure. In some circumstances direct water cooling of the side anode is desirable - examples are for during plastic web-coating to reduce radiant heating. Also in some systems with radiant heaters or high temperature processes, direct cooling of the anode is advisable. High power RF magnetrons also should have water cooled anodes due to the high energy plasma environment.
The addition of water cooling to the anode can be realised in a number of ways such as a copper cooling tube in the anode wall or as part of a detachable additional structure (see image). Insulated feedthroughs for the water tube are provided on the magnetron flange plate.

magnetron sputter cathode anode water cooling
Electrically Floating Anodes

In the case of reactive coating of dielectrics, the anode will become covered with and insulating layer. As this layer builds up, the electrical properties of the plasma will change leading to drift. To avoid this either a 'hidden' anode is required or a double magnetron arrangement. But whatever the arrangement the anode should be electrically floating to avoid this drfit. If the anode is electrically insulated, then it has no means to conduct the heat away, hence the addition of water cooling is required.

Water Cooled Gas Bar Anode