Gencoa manufacture the widest range of rectangular magnetrons available on the market for both internal and external mounting. There is an unrivalled range of magnetic options created to offer the optimum solution for you processing needs. Careful attention is given to all aspects of the simulation, design and manufacture process. Parametric 3D CAD design enables the efficient production of both standard designs and highly customised products tuned to your requirements.

The High Yield magnetics are the most commonly produced magnetic type and are recommended for most applications where increased machine up-time or reduced material costs are required. Please refer to Target Erosion for more detail. 45% Percent Guarantee Gencoa are so confident of the performance of the HY magnetics that we will refund the HY cost if at least 45% of the target is not achieved (by weight). This based upon a 100, 125  & 150mm wide bonded target type under normal operating conditions. The actual target use should be 50-60% - anything less than 45% and you will 'get your money back' - full details.

Mechanical Features

Internal shaft, cantilever and external flange mount (see tool bar on right to select) Novel 'zero-height' anode for increased long term reliability M8 target mounting screws into bearing material to prevent seizure in vacuum Reactive/Ar gas bar anodes for high uniformity and feedback response Electrically floating and hidden anode options for reactive dielectric deposition Water cooled rear mounting plate as standard - optionally side anode cooling  Anodes can be excluded when chamber flange is used - external mounts only

Plasma monitoring and fibre optic integration as an option

Specialized double magnetron cathode packages with gas anodes / bars and feedback control

High power RF optional designs - Faraday cage type construction and match box mounting