speedflo™ is a multi-channel closed loop control system for high speed adjustment of a reactive gas for magnetron sputter processes. It is an advanced direct digital control system which is adaptive to flow requirements and has many...
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Speedflo +
speedflo+ incorporates a CCD spectrometer to display the full light spectrum allowing greater flexibility in the number of materials and lines to be monitored simultaneously. Speedflo+ is best used for R&D applications as the closed loop control speed...
Speedflo EPD
speedflo EPD is an end-point detector system that senses the plasma environment to detect the change in the plasma spectrum and activate a stop-point. It can be used as an etch end-point tool or an end of target life sensor.
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