Gencoa can help with your process and machine designs by calculating the critical parameters. The calculations are based upon software developed by Gencoa in-house and covers 3 areas:
- Sputter deposition rates (see image below)
- Metals
- Oxides (reactive & compound sputtering)
- With substrate movement
- Sizes of MFC's required for sputter processes & related to:
- Chamber size
- Pumping capacity
- Process pressure
- Magnetron power and quantity
- Size of MFC's required for reactive sputtering
- Single and multi-zone calculations
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This service is free of charge to existing or potential customers. The calculations can be requested in relation to a new quote request or and existing job. Please send your requirements via email to your Gencoa sales contact. |