Gencoa TR rotatable magnetron cathodes combines robust industrially proven end-blocks with Gencoa’s low electrical impedance magnet bar designs.

The TR cathodes are available in a range of different target diameters and for horizontal, vertical and cantilever mounting styles.

 

For reactive gas systems Gencoa can integrate TR cathodes with the Speedflo gas controller for an integrated package for rate optimization and uniformity tuning.

 

 

End Blocks	Magnetics	Target Use	Process Control