Magnetron sputtering cathodes for magnetron sputtered thin films

	Magnetron
	Rotatable
	End Blocks
	Magnetics
	Process Control
	Process Controller
	Ion Source
	Retrofit
	EFS
	Zycoa
	Carbon Low...
	Gentest

Products

Rotatable

End Blocks

Gencoa have teamed up with Sputter Components Inc to offer the best rotatable magnetron sputtering package available. The SCI end-blocks have become the product of choice for PV and large area glass coaters as they combine simplicity with long and reliable operation.

SC Series

The SC 'drop-in' end-block is typically used in conjunction with a large exterior flange plate which allows easy removal of the complete cathode assembly from a machine port. Its the typical arrangement for large architectural glass coating machines. The standard SC end-block can be mounted in a horizontal or vertical arrangement and accepts targets upto 4m in length with an applied power of 200 kW at 80kHz AC power - 450A. It is compatible to replace existing end-blocks and offers a 1 hour end-block rebuild.

rotatable magnetron mini end block

MC Series

The MC is a mini 'drop-in' end-block that occupies less space than the larger SC type. The MC is just 154mm wide and is suitable for target lengths of upto 1500mm mounted in a horizontal or vertical arrangement. The applied power limit is 60 kW at 80kHz AC power - 200A. The MC is easier to retro-fit in confined spaces and allows a longer effective target length and better uniformity when compared to the SC. It has same reliable operation combined with a simple installation proceedure.

SM Series

The SM is a style of end-block for side mounting through a vacuum chamber wall. This type of arrangement uses less space within the process chamber as the end-block drive and support is located on the atmosphere side. Advantages are that the target can be the full chamber width and hence a larger substrate is possible for the same size of platform. Its is also well suited to Roll-to-Roll type systems where cantilever style insertion and retraction allows better machine access. The SM runs at 200kW at 80kHz and 200 Amps with target lengths to 4m.