In some cases where it is not necessary or desirable to replace a complete magnetron cathode, it is possible for Gencoa to provide a replacement magnetic system to fit into the existing cathode body. This is a cost effective method of upgrading the performance of the current system. In nearly all cases it is possible to fit our standard SW or PP magnetic systems. In 70% of cases it is possible to fit our High Yield (HY) type magnetics.

Possible reasons to replace magnets are as follows:

• Defective magnets
  • Corrosion of magnets located in water (very common)
  • Over-heating and de-gaussing of the magnets
• To increase target utilisation
• To increase magnetic field strength for low pressure/voltage or magnetic material sputtering
• To improve coating uniformity in both circular and rectangular geometries
• To enhance plasma reactivity and energy by unbalancing the magnetic field
• To reduce arcing by avoiding closed magnetic field interactions with system anodes
• To achieve cleaner targets, especially in reactive sputtering