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Target Erosion |
Gencoa have developed a programme that can predict the erosion of the target. This uses data supplied by the finite element modelling of the magnetic field. The software allows direct simulation of the target erosion, eliminating the requirement for a plasma test in the design...
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Coating Uniformity |
Gencoa have developed a program that can predict the coating uniformity on a substrate. The program calculates the sputtering probability across the substrate and hence a model of the coating flux from the target material can be generated. Correction factors can be added to...
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FE Modelling (magnetics) |
Gencoa currently use both 2D and 3D finite element modelling packages to create magnetic field designs specific to customer requirements. Factors that are taken into consideration include magnetron size and type, target material, target thickness, process requirements and any...
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