Sputtering is a physical process that takes place in a vacuum. A wide range of materials may be sputtered including metals, alloys and ceramics. Here are some of the questions that will be answered in this section.
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What is sputtering? |
Atoms from a solid target material are ejected due to bombardment of the material by energetic ions or neutral particles from an inert gas.
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What is a magnetron? |
A magnetron is comprised of a cathode (electron source), an anode (electron collector) and a combined electric and magnetic field.
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