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Uniformity from Gencoa Magnetrons
Gencoa magnetrons incorporate a precision magnetic system to ensure a high degree of accuracy for the location and alignment of magnets. The magnets are located by means of a ferro-magnetic pole piece underneath the magnet and a non-magnetic alignment piece either side. All items are screwed onto a machined ferro-magnetic pole plate. This means that the magnet positions have minimum variations laterally or radially. Each NdFeB magnet is manufactured to 0.1mm accuracy and within a strict upper and lower limit for the energy product of the magnet.
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The magnetic system design and manufacture ensures the plasma distribution is highly uniform and no in-homogenities occur as a result of the magnetic field. The magnets are also located outside the cooling water system, hence there is no possibility of corrosion or degradation with time. In high humidity environments it is likely that moisture can condense on the magnets as they are cooler than the surrounding atmosphere. This can also cause corrosion, hence every magnet has a protective layer to guard against atmospheric corrosion effects.
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Humidity Sealing on External Mounted Magnetrons
In order to guard against water incress and atmospheric condensation of water, all externally mounted magnetrons are sealed and a humdity sensor / dessicator is fitted that dries the internal atmosphere and monitors the level of moisture.
This ensures that the magnetic system remains in perfect condition and any water spillages external to the magnetron cannot affect the internal areas of the source.
Uniformity on the substrate
The main driver for uniformity is the system geometry. This is different for circular & rectangular magnetrons.
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*Note: NdFeB magnet types are covered by a patent owned by Sumitomo Special Metals (http://www.sumitomosma.com). Although much of NdFeB material produced is without royalty payments, every NdFeB magnet used in a Gencoa magnetron is licensed material and the patent royalty has been paid. Certificates are available for each magnetron order.
**USP 5,645,651 covers a compound having tetragonal crystal structure and is valid until July 8,2014.
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Coating uniformity issues
