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Gencoa currently use both 2D and 3D finite element modelling packages to create magnetic field designs specific to customer requirements. Factors that are taken into consideration include magnetron size and type, target material, target thickness, process requirements and any ferromagnetic components that may be present in the vacuum chamber. Once the magnetic array has been designed, a magnetic field picture is generated from which valuable information can be gained such as magnetic field strength and shape, level of balance and erosion points. This information is then used to optimize, for example, target erosion, coating uniformity, anode position, substrate position and substrate bombardment. To create a perfect design many factors need to be taken into account with several iterations of any design required.
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