Balanced Magnetic Option (SW)

Balanced magnetic field. Conventional 2 pole magnetic array. Closed magnetic field trap. Magnetic field confined around the target racetrack. Minimum loss of electrons. Suitable for low voltage operation. Minimum plasma release to the substrate. Lower substrate temperature. Possible to combine with all other options except for PP option.

A balanced source contains a conventional type of magnetic array. The term balanced reflects the nature of the magnetic field trap. The field lines are well confined around the target racetrack and electron loss is reduced to minimum. This encourages low voltage operation and a minimum of plasma release to the substrate. Substrate temperatures are lower for this type of array since electron and ion bombardment is lower.

The Gencoa SW magnetrons have superceded conventional magnetic array types in terms of the level of magnetic field strength (300 - 1000 Gauss) and the control of the field shape relative to the anode positions. For higher field strength versions there is a reduced possibility of electron loss from the magnetron plasma since the escape is more difficult. This reduces the discharge voltage and increases the discharge current and also has a benefit for low-pressure operation as does the high strength magnetic array option..

The careful positioning of the magnetic field in front of the target and control of its shape reduces the possibility of arcing in difficult applications and improves target use. An Gencoa optimised 2 pole magnetic design can produce target use of greater than 30% at the same time as reducing the re-deposit area in the middle and outer edge of the target. For higher target use more complicated multipole or moving magnetics are used.