3G Circular Magnetron

3G-tilt-4.pngGencoa offer a comprehensive range of circular planar magnetrons, catering for applications from R&D to production. A large array of configurations result in solutions for the challenging demands of real processes.

The new third generation range of small circular magnetrons from Gencoa now includes ±45˚ tilt adjustment, gas injection and a rear utility box for DC, DC-pulsed, RF and HIPIMS processes as standard.

The sources can be fitted with various magnetic and mechanical options, leading to performance benefits appropriate for differing applications, and are built to reliably work with DC, RF, pulsed DC and HiPIMS power supplies.

Key features

  • Smallest footprint
  • ± 45º tilt angle adjustment (1° accuracy)
  • Standard target sizes
  • Internal gas injection as standard
  • Rear utility box as standard for RF and HIPIMS
  • Easy target change and choice of target thickness (1-6mm)
  • High strength magnetics for sputtering of magnetic material
  • Indirect or direct target cooling (pre-configured)

Mechanical options

Gencoa circular magnetrons come with a wide choice of mechanical options. All magnetrons are available for internal or external mount, with the following additional options: manual or pneumatic shutter, chimney, wallmount feedthrough, hidden and water-cooled anode.

Dimensions

Outline drawings for each of the configurations of 3G Circular magnetron are available below, for each available target size.

(Full options including tilt, gas injection, RF power and utility box)
2 inch
3 inch
4 inch

(Option A - all 3G options excluding tilt)
2 inch
3 inch
4 inch

(Option B - includes gas injection. Excludes tilt and utility box)
2 inch
3 inch
4 inch

(Option C - includes tilt and gas injection. Excludes utility box)
2 inch
3 inch
4 inch

(External - includes gas injection and RF power)
2 inch
3 inch
4 inch

Further information

A product specification sheet is available, covering target diameters of 2", 3", 4" and 5". Click to download, or contact sales@gencoa.com for further information.