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Magnetics

Target Diameter (mm)  
Target Thickness (mm)Target Area (cm2)

Materials

Material Type: All  Pure  Compound  Reactive 

Material Name: 

Relative Sputter Rate



Power ValuePower Type
Power DensityDC
Total PowerRF
Total Power (kW)Power Density (W/cm2)

Substrates

Target to Substrate Distance (cm)
Substrate Speed (cm/min)
Number of Passes  
 
Substrate Direction
Across Target WidthAcross Target Length
Coating Thickness and Target Material
Coating Thickness for Layer (nm)
Target Material Left Unsputtered (mm)
Coating Rate
 Worst Case
(1 - Factor)		Average Case
(1.25 - Factor)		Best Case
(1.5 - Factor)
Approx. Static Coating Rate
(nm/min)
Coating Thickness
(nm)
Dynamic Coating Rate
(nm.m/min)
No of Magnetrons
(1 side only)
Standard Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)
High Yield Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)
FFE Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)
Rotatable Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)