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Magnetics
Target Width (cm)
Target Length (cm)
Target Thickness (mm)
Target Area (cm2)
Materials
Material Type: All
Pure
Compound
Reactive
Material Name:
Aluminium doped Zinc Oxide
Aluminium Oxide
Antimony Telluride
Cadium Sulphide
Gallium Antimonide
Gallium Arsenide
Gallium Phosphate
Indium Antimonide
Indium Tin Oxide
intrinsic Zinc Oxide
Palladium Telluride
Silicon Carbide
Silicon Dioxide
Stainless Steel
Relative Sputter Rate
Power Value
Power Type
Power Density
DC
Total Power
RF
Total Power (kW)
Power Density (W/cm2)
Substrates
Target to Substrate Distance (cm)
Substrate Speed (cm/min)
Number of Passes
Substrate Direction
Across Target Width
Across Target Length
Coating Thickness and Target Material
Coating Thickness for Layer (nm)
Target Material Left Unsputtered (mm)
Coating Rate
Worst Case
(1 - Factor)
Average Case
(1.25 - Factor)
Best Case
(1.5 - Factor)
Approx. Static Coating Rate
(nm/min)
Coating Thickness
(nm)
Dynamic Coating Rate
(nm.m/min)
No of Magnetrons
(1 side only)
Standard Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)
High Yield Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)
FFE Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)
Rotatable Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)