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Magnetics
Target Width (cm)
Target Length (cm)
Target Thickness (mm)
Target Area (cm2)
Materials
Material Type: All
Pure
Compound
Reactive
Material Name:
Aluminium
Carbon
Chromium
Cobalt
Copper
Germanium
Gold
Indium
Iron
Lead
Molybdenum
Nickel
Niobium
Osmium
Palladium
Platinium
Rhenium
Rodium
Samarium
Silicon
Silver
Tantalum
Thorium
Tin
Titanium
Tungsten
Uranium
Yttrium
Zinc
Zirconium
Relative Sputter Rate
Relative Reactive Sputter Rate(%)
Power Value
Power Type
Power Density
DC
Total Power
RF
Total Power (kW)
Power Density (W/cm2)
Substrates
Target to Substrate Distance (cm)
Substrate Speed (cm/min)
Number of Passes
Substrate Direction
Across Target Width
Across Target Length
Coating Thickness and Target Material
Coating Thickness for Layer (nm)
Target Material Left Unsputtered (mm)
Coating Rate
Worst Case
(1 - Factor)
Average Case
(1.25 - Factor)
Best Case
(1.5 - Factor)
Approx. Static Coating Rate
(nm/min)
Coating Thickness
(nm)
Dynamic Coating Rate
(nm.m/min)
No of Magnetrons
(1 side only)
Standard Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)
High Yield Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)
FFE Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)
Rotatable Magnetics
Target Use (%)
Target Lifetime (continuous hours)
Target Lifetime (kilowatt hours)