GRS-M

The GRS-M product is a high capacity 'drop-in' rotatable magnetron for target diameters of 152mm and above, and target lengths of up to 2m, in a vertical or horizontal orientation.

Whilst able to accommodate high target loads, the space required for the GRS-M is reduced as a result of the Gencoa patented rotational drive system. To make the most of the compact nature, the GRS-M is hence ideal for vertical display coaters or horizontal in-line coating systems.

When combined with Active Anodes higher rate and quality oxides and ITO layers are produced.

Advantages

  • Double seals for target mounting and double screws target fixing
  • Unique patented drive system provides a compact and high capacity end block design
  • High water flow (60 l/min)
  • Market leading integrity of vacuum seals – better than 5x10-8 mbar l/s He leak rate under rotation
  • Utilises Gencoa’s high performance magnetics including balanced, unbalanced, high strength and DLIM options
  • Low deflection magnet bar support tubes
  • Can incorporate an active anode in dual configuration for higher density, low defect and low stress layers
  • Unique seal design for reliable operation sets it apart from other competitors
  • High uniformity in a confined space, 107mm from outer edge of endblock to race-track
  • Can be used in conjunction with Gencoa gas bars, active anode, Optix and Speedflo

Key features

  • Up to 2m long targets possible, greater depending upon weight and orientation depending on weight
  • Flange mounted to drop into a chamber opening
  • Accommodation of Ø152mm targets
  • 1” ID quick release water connections for high flow
  • DC motor drive with RS-485 interface and possible PLC integration
  • Power connections: DC via 7/16 or AC/DC via Harting
  • Operational speed up to 15RPM
  • Single or dual units can be mounted on a single flange plate
  • Complete drop-in assemblies available with Active Anodes, multi-zone gas delivery bars and drive/water monitoring

Gallery

Related Applications

Product brochure

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