Circular magnetron

Gencoa offer a comprehensive range of circular magnetrons, catering for applications from R&D to semiconductor production. A wide choice of magnetic and mechanical configurations deliver tailored solutions for each process.

Gencoa Circular 3G magnetron

3G Circular

A third generation of Gencoa HV sources, with internal gas injection, indirect or direct target water cooling and ±45° tilt adjustment.

Gencoa standard circular magnetron

Standard Circular

For target diameters of 6"-16", Gencoa offer an established design of circular magnetron, suitable for coating larger areas.

Gencoa circular FFE magnetron

Circular FFE

A powerful tool for high-rate deposition of sputtered layers, with motor driven dynamic plasma scanning to deliver high target use.

Gencoa Circular Vtech magnetron

Circular Vtech

The unique Vtech magnetron allows for variations of magnetic field properties to be applied. Available for target diameters of 2" to 6".

Perfect your process.
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