Circular magnetron
Gencoa offer a comprehensive range of circular magnetrons, catering for applications from R&D to semiconductor production. A wide selection of configurations result in solutions for challenging demands of real processes.
3G Circular
A third generation of HV sources for 2" to 5" target diameters, with internal gas injection, indirect or direct target water cooling and ±45° tilt adjustment as standard.
Standard Circular
For target diameters of 6"-16", Gencoa offer an established design of circular magnetron, suitable for coating larger areas.
Circular FFE
A unique and powerful tool for the high-rate deposition of sputtered layers with high target use achieved by the use of motor driven dynamic plasma scanning.
Circular Vtech
The unique Vtech magnetron allows for variations of magnetic field properties to be applied. Available for target diameters of 2" to 6".
Downloads
3G circular magnetron flyer- Gencoa Circular FFE flyer
- SVC Techcon 2022: Process Benefits of a Clean Sputter Target by Dynamic Plasma Movement on Circular Planar Magnetrons
- Magnetic options for planar magnetrons
Upcoming Events
- 11-16 May 2025 - ICMCTF 2025
- 17-22 May 2025 - SVC Techcon 2025
- 17-19 June 2025 - R2R Europe Conference
- 22-25 June 2025 - ALD/ALE 2025
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