The GRS-M product is a high capacity 'drop-in' rotatable magnetron for target diameters of 152mm and above, and target lengths of up to 2m, in a vertical or horizontal orientation.

Whilst able to accommodate high target loads, the space required for the GRS-M is reduced as a result of the Gencoa patented rotational drive system. To make the most of the compact nature, the GRS-M is hence ideal for vertical display coaters or horizontal in-line coating systems.

When combined with Active Anodes higher rate and quality oxides and ITO layers are produced.


  • Double seals for target mounting and double screws target fixing
  • Unique patented drive system provides a compact and high capacity end block design
  • High water flow (60 l/min)
  • Market leading integrity of vacuum seals – better than 5x10-8 mbar l/s He leak rate under rotation
  • Utilises Gencoa’s high performance magnetics including balanced, unbalanced, high strength and DLIM options
  • Low deflection magnet bar support tubes
  • Can incorporate an active anode in dual configuration for higher density, low defect and low stress layers
  • Unique seal design for reliable operation sets it apart from other competitors
  • High uniformity in a confined space, 107mm from outer edge of endblock to race-track
  • Can be used in conjunction with Gencoa gas bars, active anode, Optix and Speedflo

Key features

  • Up to 2m long targets possible, greater depending upon weight and orientation depending on weight
  • Flange mounted to drop into a chamber opening
  • Accommodation of Ø152mm targets
  • 1” ID quick release water connections for high flow
  • DC motor drive with RS-485 interface and possible PLC integration
  • Power connections: DC via 7/16 or AC/DC via Harting
  • Operational speed up to 15RPM
  • Single or dual units can be mounted on a single flange plate
  • Complete drop-in assemblies available with Active Anodes, multi-zone gas delivery bars and drive/water monitoring




Related Applications

Contact Gencoa

Gencoa premises

To contact Gencoa at our Liverpool headquarters, click for contact details.

For details of international representatives, refer to our list of worldwide contacts.