Gencoa have a well-established track record of providing rectangular planar magnetrons and technology for coating of flexible substrates, architectural glass, solar cells, displays, touch screens and semiconductor wafers. In particular, the electrical insulation of our cathodes mean we are the partner of choice for any high power RF or HIPIMS application.
Our planar rectangular magnetrons combine low ownership cost, robust design and highly-optimized magnetics to produce a reliable product delivering high performance.
A unique design incorporating 'zero-height' anodes prevent short circuits during processes and reduce dust and defects in the coatings. All sources incorporate rear flange plate cooling as standard and additional anode water cooling is optional.
Depending on the application, Gencoa can configure individual cathodes to meet specific process requirements and limitations. An OEM proprietary magnetron design and manufacture service is also offered, and cathode CAD dimensional data is available in 2D and 3D formats from the Customer Tools section of the website.
High Yield (HY) range achieve 40% target utilization and are recommended for applications where increased machine up-time or reduced material costs are required.
Metallizer (MZ) range is designed for high-rate metallizing of webs, car parts and decorative applications. Using specially-designed thick profiled targets and high water flows, the MZ range can increase the machine up-time by 100%.
Vtech (VTER) range is dedicated to ion assisted deposition processes, where the degree of plasma impact on the growing film can be automatically varied by in-situ changing of the magnetic field.
Full Face Erosion (FFE) magnetics are suited to processes where clean deposition and efficient target use are required, such as ITO and precious metal deposition. Target cleanliness is achieved by moving the plasma across the target surface.