Speedflo by Gencoa


Speedflo is a multi-channel closed-loop control system for high speed adjustment of a reactive gas during magnetron sputter processes.

Its advanced digital control system automatically regulates gas flow to meet reactive sputtering requirements.

Speedflo's advanced variable structure control algorithm offers significant performance improvements over conventional PID control techniques, both in terms of speed and robustness.

Why reactive gas control?

Feedback control of reactive gas enables improved deposition rates, coating properties and process reliability, which are not possible to achieve with constant flow. Read more >

Why choose Speedflo?

  • Robust and reliable
    Hardware and software evolved based on demands of real processes.
  • Fully supported
    Gencoa's process knowledge and experience is available to you at every stage, from remote assistance to on-site support.
  • Flexible
    Speedflo comes with a range of sensor, IO and communication options to meet the demands of your process.

More reasons to choose Speedflo >


  • Increased sputter rates
    Fast acting feedback control of reactive gas enables increased deposition rates and improved process stability.
  • Improved uniformity
    Simultaneous control of multiple gas inputs allows for uniformity to be controlled along the target length.
  • Better process monitoring
    Several sensor and monitoring options give you a complete picture of the process.
Read more on the benefits offered by using Speedflo >